Interferometric surface measurement

Participants will learn principles of interferometry and how to choose different interferometers, make accurate measurements and extract quantitative information from the measurements.  Introductory lectures cover the basics of interferometry and coherence.  Lab sessions focus on developing skills on: setting up test configurations for Fizeau, Twyman-Green and white-light interferometers, demonstrating interferometry limitations, including retrace error, vibration error and spacial bandwidth; estimating random errors in measurements; calibrating the reference surface error using random ball test; and operating the interferometer in vertical scanning and phase shifting modes, etc.


Dae Wook Kim, Workshop instructor